全部作者 Jen-Ching Huang, Huail-Siang Liu, Cheng-Shuo Xue, Gui-Jia Zhang, Xin-Ming Zhan
論文名稱 The Study on the Fabrication of Nanostructure and Nanomold by Nano-oxidation and Hydrofluoric Acid Etching on TiAlN Thin Film
卷數 34
期數 4
論文類型 46
發表日期 2026-03-01
檔案
  • 04-The Study on the Fabrication of Nanostructure and Nanomold by Nano-oxidation and Hydrofluoric Acid Etching on TiAlN Thin Film-353-359JCMES.pdf