年度 2007
全部作者 S-Y.Yang, Y-J.Weng, Y-C.Weng, J.-L.Weng, J.-C.Huang and J.-W.Lee
論文名稱 A study of nano-indention detection and deformation mode construction using su-8 microstructure devices produced with nano-imprint technology
會議名稱 2007 INTERNATIONAL SYMPOSIUM ON NANO SCIENCE AND TECHNOLOGY
地點 台灣Taiwan - Tainan
著作人數 5