年度 | 2007 |
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全部作者 | S-Y.Yang, Y-J.Weng, Y-C.Weng, J.-L.Weng, J.-C.Huang and J.-W.Lee |
論文名稱 | A study of nano-indention detection and deformation mode construction using su-8 microstructure devices produced with nano-imprint technology |
會議名稱 | 2007 INTERNATIONAL SYMPOSIUM ON NANO SCIENCE AND TECHNOLOGY |
地點 | 台灣Taiwan - Tainan |
著作人數 | 5 |